Fab utilities
FFU
fan filter unit
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 클린룸 천장에 붙어 공기를 고성능 필터로 걸러 아래로 내려보내는 장치입니다.
- Synonyms
- 팬 필터 유닛
- English
- fan filter unit
- Related terms
- 클린룸cleanroomAMCairborne molecular contamination
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/fan-filter-unit
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “FFU” (fan filter unit), version 0.1.1, https://ontocraft.com/terms/fan-filter-unit, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text