Front-end wafer processing
EUV 노광
extreme ultraviolet lithography
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 파장이 아주 짧은 극자외선으로 미세한 무늬를 찍는 노광 방식입니다. 진공 안에서 거울로 빛을 반사시켜 씁니다.
- Synonyms
- EUV · 극자외선 노광
- English
- extreme ultraviolet lithography
- Broader term
- 포토 공정photolithography
- Related terms
- 포토마스크photomask공정 노드technology node
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/euv-lithography
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “EUV 노광” (extreme ultraviolet lithography), version 0.1.1, https://ontocraft.com/terms/euv-lithography, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text