Front-end wafer processing
포토 공정
photolithography
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 감광액을 바른 웨이퍼에 마스크의 회로 무늬를 빛으로 옮기는 공정입니다. 도포, 노광, 현상 단계로 이루어집니다.
- Synonyms
- 포토 · 리소그래피 · 노광
- English
- photolithography
- Broader term
- 전공정front-end process
- Narrower terms
- EUV 노광extreme ultraviolet lithography
- Related terms
- 감광액photoresist포토마스크photomask오버레이overlay
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/photolithography
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “포토 공정” (photolithography), version 0.1.1, https://ontocraft.com/terms/photolithography, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text