Fab operations

로드 포트

load port

Definition(Written in Korean)

장비 앞에서 FOUP을 받아 문을 열고 웨이퍼를 장비 안으로 넘기는 장치입니다.

Synonyms

LP

English

load port

Related terms

FOUPfront opening unified podOHToverhead hoist transport

Corresponding standards

SEMI E84 · SEMI E87

Only the names of standards are listed. They have not been compared with the standards' original text, so the definition is not claimed to match them.

Added in version

0.1.0

Permanent URI

https://ontocraft.com/terms/load-port

JSON-LD for this term

Citation

OntoCraft Korean Industrial Term Registry, “로드 포트” (load port), version 0.1.1, https://ontocraft.com/terms/load-port, CC BY 4.0.