Fab operations

FOUP

front opening unified pod

Definition(Written in Korean)

300mm 웨이퍼를 담아 바깥 공기와 막아 둔 채 옮기는 앞문 달린 밀폐 용기입니다.

Synonyms

풉 · 웨이퍼 캐리어

English

front opening unified pod

Related terms

로트lot로드 포트load portAMHSautomated material handling system

Corresponding standards

SEMI E47.1

Only the names of standards are listed. They have not been compared with the standards' original text, so the definition is not claimed to match them.

Added in version

0.1.0

Permanent URI

https://ontocraft.com/terms/foup

JSON-LD for this term

Citation

OntoCraft Korean Industrial Term Registry, “FOUP” (front opening unified pod), version 0.1.1, https://ontocraft.com/terms/foup, CC BY 4.0.