Fab utilities
로컬 스크러버
point-of-use abatement
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 장비 가까이에서 유해 배기가스를 태우거나 씻어 독성을 줄이는 장치입니다.
- Synonyms
- POU 스크러버 · 가스 처리 장치
- English
- point-of-use abatement
- Broader term
- 공정 배기process exhaust
- Related terms
- 특수 가스specialty gas서브팹sub-fab
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/point-of-use-abatement
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “로컬 스크러버” (point-of-use abatement), version 0.1.1, https://ontocraft.com/terms/point-of-use-abatement, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text