Fab utilities
초순수
ultrapure water
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 이온, 유기물, 입자, 용존 가스를 거의 다 걷어 낸 물입니다. 세정과 습식 공정에 대량으로 씁니다.
- Synonyms
- UPW · DI워터
- English
- ultrapure water
- Related terms
- 세정wafer cleaning공정 폐수fab wastewater
- Corresponding standards
SEMI F63 · ASTM D5127
Only the names of standards are listed. They have not been compared with the standards' original text, so the definition is not claimed to match them.
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/ultrapure-water
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “초순수” (ultrapure water), version 0.1.1, https://ontocraft.com/terms/ultrapure-water, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text