Quality and metrology
막 두께
film thickness
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 증착, 산화, 연마 뒤에 남은 막의 두께입니다. 웨이퍼 안의 여러 지점을 재어 평균과 균일도를 봅니다.
- Example of use
- 증착 뒤 계측 결과에는 지점별 두께와 함께 웨이퍼 평균과 균일도가 적힙니다.
- Synonyms
- THK · 두께
- English
- film thickness
- Broader term
- 계측metrology
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/film-thickness
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “막 두께” (film thickness), version 0.1.1, https://ontocraft.com/terms/film-thickness, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text