Quality and metrology
계측
metrology
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 막 두께, 선폭, 층간 정렬 같은 공정 결과값을 재는 일입니다. 정해진 지점만 표본으로 잽니다.
- Synonyms
- 측정 · 메트롤로지
- English
- metrology
- Narrower terms
- CDcritical dimension오버레이overlay막 두께film thickness
- Related terms
- CDcritical dimension오버레이overlay막 두께film thickness
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/fab-metrology
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “계측” (metrology), version 0.1.1, https://ontocraft.com/terms/fab-metrology, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text