Fab operations
로트
lot
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 같은 공정을 함께 거치도록 묶은 웨이퍼 무리입니다. 보통 FOUP 하나에 담기고 팹 안에서 추적하는 기본 단위가 됩니다.
- Example of use
- MES 로트 기록에는 로트 번호, 담긴 웨이퍼 장수, 현재 공정 단계, FOUP 번호가 함께 남습니다.
- Synonyms
- Lot · 랏
- English
- lot
- Corresponding standards
SEMI E90
Only the names of standards are listed. They have not been compared with the standards' original text, so the definition is not claimed to match them.
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/wafer-lot
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “로트” (lot), version 0.1.1, https://ontocraft.com/terms/wafer-lot, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text