Fab utilities

공정 케미컬

process chemical

Definition(Written in Korean)

세정, 습식 식각, 연마, 현상에 쓰는 액체 화학 약품입니다. 기체로 들어가는 공정 가스와 따로 공급하고 관리하며, 쓰고 난 약품은 공정 폐수로 나눠 모읍니다.

Synonyms

케미컬 · 약액

English

process chemical

Related terms

세정wafer cleaningCMPchemical mechanical polishing공정 폐수fab wastewater

Corresponding standards

화학물질관리법

Only the names of standards are listed. They have not been compared with the standards' original text, so the definition is not claimed to match them.

Added in version

0.1.0

Permanent URI

https://ontocraft.com/terms/process-chemical

JSON-LD for this term

Citation

OntoCraft Korean Industrial Term Registry, “공정 케미컬” (process chemical), version 0.1.1, https://ontocraft.com/terms/process-chemical, CC BY 4.0.