Front-end wafer processing
확산 공정
diffusion process
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 여러 장의 웨이퍼를 고온 로에 넣어 산화, 불순물 확산, 열처리를 하는 공정을 묶어 부르는 말입니다.
- Synonyms
- 확산 · 퍼니스 공정
- English
- diffusion process
- Broader term
- 전공정front-end process
- Related terms
- 산화thermal oxidation열처리anneal
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/diffusion-process
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “확산 공정” (diffusion process), version 0.1.1, https://ontocraft.com/terms/diffusion-process, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text