Front-end wafer processing
열처리
anneal
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 웨이퍼를 가열해 주입한 불순물을 활성화하거나 막의 결함을 회복시키는 공정입니다.
- Synonyms
- 어닐 · 어닐링
- English
- anneal
- Broader term
- 전공정front-end process
- Related terms
- 이온주입ion implantation확산 공정diffusion process
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/wafer-anneal
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “열처리” (anneal), version 0.1.1, https://ontocraft.com/terms/wafer-anneal, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text