Front-end wafer processing
산화
thermal oxidation
DraftVersion 0.1.1Updated 2026-10-09
- Definition(Written in Korean)
- 높은 온도에서 실리콘 표면을 산소나 수증기와 반응시켜 산화막을 기르는 공정입니다.
- Synonyms
- 산화 공정 · 옥시데이션
- English
- thermal oxidation
- Broader term
- 전공정front-end process
- Related terms
- 확산 공정diffusion process막 두께film thickness
- Added in version
- 0.1.0
- Permanent URI
https://ontocraft.com/terms/thermal-oxidation
JSON-LD for this term- Citation
- OntoCraft Korean Industrial Term Registry, “산화” (thermal oxidation), version 0.1.1, https://ontocraft.com/terms/thermal-oxidation, CC BY 4.0.
CC BY 4.0. Source: OntoCraft Korean Industrial Term Registry · License text