Front-end wafer processing

전공정

front-end process

Definition(Written in Korean)

빈 웨이퍼 위에 소자와 배선을 만드는 공정 전체입니다. 산화, 포토, 식각, 증착, 이온주입, 연마, 세정을 수백 단계 되풀이합니다.

Synonyms

웨이퍼 공정 · 팹 공정 · FAB 공정

English

front-end process

Narrower terms

BEOLback end of line산화thermal oxidation확산 공정diffusion process이온주입ion implantation열처리anneal포토 공정photolithography식각etching증착thin film depositionCMPchemical mechanical polishing세정wafer cleaning

Related terms

후공정back-end process공정 흐름process flow

Added in version

0.1.0

Permanent URI

https://ontocraft.com/terms/front-end-process

JSON-LD for this term

Citation

OntoCraft Korean Industrial Term Registry, “전공정” (front-end process), version 0.1.1, https://ontocraft.com/terms/front-end-process, CC BY 4.0.